Determination and correction for laser induced CCD camera...

Details Determination and correction for laser induced CCD camera... Determination and correction for laser induced CCD camera...

2007-08-07

2007-08-07

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

C356S451000, C250S339070, C250S339080, C250S339090

Reexamination Certificate

active

10718484

ABSTRACT:
A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.

REFERENCES:
patent: 4751659 (1988-06-01), Hecht
patent: 6618185 (2003-09-01), Sandstrom
patent: 7038720 (2006-05-01), Rogers et al.
patent: 7038782 (2006-05-01), Hedin et al.

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