Detergent injection systems and methods for carbon dioxide...

Details Detergent injection systems and methods for carbon dioxide... Detergent injection systems and methods for carbon dioxide...

2006-05-16

2006-05-16

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With heating, cooling or heat exchange means

C134S108000, C134S094100, C134S100100

Reexamination Certificate

active

07044143

ABSTRACT:
Microelectronic substrate processing systems include a microelectronic substrate processing chamber that is configured to contain therein at least one microelectronic substrate. A carbon dioxide supply system is configured to supply densified carbon dioxide to the microelectronic substrate processing chamber. A detergent supply system is configured to supply detergent to the microelectronic substrate processing chamber.

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