Detector system of secondary and backscattered electrons for...

Details Detector system of secondary and backscattered electrons for... Detector system of secondary and backscattered electrons for...

2006-04-14

2008-12-30

Berman, Jack I (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S305000, C250S307000, C250S310000, C250S311000, C250S3960ML, C313S1030CM, C313S1050CM

Reexamination Certificate

active

07470915

ABSTRACT:
A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) faces toward a specimen stage (11). A movable diaphragm (14) having an aperture (15) is located between the front end of a photomultiplier (7) and the respective ends of an upper light guide (13) and lower light guide (6). Inside an intermediate chamber (3), at least one focusing electrode (8) is placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) is located on the surface of the lower scintillator (5).

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