Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-02-06
2007-02-06
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559400, C250S559450, C250S559460, C250S559270, C250S234000, C356S237300, C356S237400, C356S239800
Reexamination Certificate
active
11229832
ABSTRACT:
A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable actuator to adjust a distance between the projection system and the substrate; and a particle detector system to detect a particle on a surface of the substrate. The particle detector system has illumination optics directing the radiation to a detection area of the surface of the substrate, detection optics receiving radiation from the detection area of the surface of the substrate, and a detector coupled to the detection optics to produce a measurement signal. The apparatus further has a processing system to determine the height of a particle from the measurement signal, generate a height excess signal if the height exceeds a threshold value, and control the actuator in response to the height excess signal.
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Bruinsma Anastasius Jacobus Anicetus
Draaisma Folkert
Hoogkamp Jan Frederick
Moddemeijer Kees
Van Groos Pieter Johannes Marius
ASML Netherlands B.V.
Luu Thanh X.
Monbleau Davienne
Pillsbury Winthrop Shaw & Pittman LLP
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