Detector objective for particle beam apparatus

Details Detector objective for particle beam apparatus Detector objective for particle beam apparatus

1987-12-08

1989-05-16

Anderson, Bruce C.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250396ML, 250310, H01J 37244

Patent

active

048312665

ABSTRACT:
A detector objective forms a component of an electron-optical column of a scanning electron microscope, the detector objective being composed of an asymmetrical magnetic lens, an electrostatic immersion lens generating a substantially rotationally symmetrical field, and an annular detector disposed immediately above the magnetic lens body. An electrode of the electrostatic immersion lens is formed as a truncated cone and is arranged in insulated fashion in an upper pole piece of the magnetic lens. The lower pole piece forms the second electrode of the immersion lens. The first and second electrodes are charged with potentials that establish an electrical field for decelerating the primary electrons, the electrical field overlying the focusing magnetic field.

REFERENCES:
patent: 3896308 (1975-07-01), Venables et al.
patent: 4110622 (1978-08-01), Trotel
patent: 4546258 (1985-10-01), Chisholm
patent: 4596929 (1986-06-01), Coates et al.
patent: 4714833 (1987-12-01), Rose et al.
patent: 4785176 (1988-11-01), Frosien et al.
Halbleiterdetektoren fur ionisierende Strahlung, from Philips' Technische Rundschau, by W. K. Hofker, No. 12, 1966, pp. 323-337.
Co-pending U.S. application Ser. No. 30,964, filed 3/27/87.
"The Encyclopedia of Physics", by Robert M. Besancon, p. 278.
"Elektronenoptik", vol. 1 (Grundzuege der theoretischen Elektronenoptik), Verlap Birkhauser, Basel (1950), by A. Rusterholz.

Affiliated with

Also associated with

Rating

Detector objective for particle beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector objective for particle beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector objective for particle beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2324967