Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1991-05-02
1993-05-04
James, Andrew J.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257442, 257 49, 257614, H01L 2714, H01L 3100
Patent
active
052084787
ABSTRACT:
A method for constructing an infrared detector array directly upon a detector interface device is disclosed. The detector interface device mechanically and electrically connects the infrared detector array to signal processing equipment. In a first embodiment of the invention encapsulated single crystalline material is formed within a cavity formed in a substrate. The encapsulated single crystalline material formed within the substrate cavity is suitable for use as a seed crystal for graphotaxial crystal growth of a detector element support layer across the surface of the substrate. Detector elements can then be formed upon the detector element support layer. In a second embodiment of the invention a plurality of detector element support layers can be formed within an array of cavities formed upon the substrate. An individual infrared detector element can then be formed directly upon each of the detector element support layers to form a detector array upon the substrate. The use of a non-single crystalline substrate such as an alumina ceramic material provides sufficient structural integrity and thermal stability for the substrate to serve as a detector interface device to reliably connect the infrared detector elements to Z-plane modules.
REFERENCES:
patent: 5036703 (1991-07-01), Solomon
patent: 5045907 (1991-09-01), Solomon
Crane Sara W.
Grumman Aerospace Corp.
James Andrew J.
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