Detector for variable pressure areas and an electron...

Details Detector for variable pressure areas and an electron... Detector for variable pressure areas and an electron...

2001-06-29

2008-12-09

Nguyen, Kiet T (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S310000

Reexamination Certificate

active

07462839

ABSTRACT:
A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

REFERENCES:
patent: 4785182 (1988-11-01), Mancuso et al.
patent: 4897545 (1990-01-01), Danilatos
patent: 4992662 (1991-02-01), Danilatos
patent: 5396067 (1995-03-01), Suzuki et al.
patent: 6590210 (2003-07-01), Essers
patent: 6707041 (2004-03-01), Essers
patent: 4009692 (1990-10-01), None
patent: 11 096956 (1999-04-01), None
patent: WO 98/22971 (1998-05-01), None
International Search Report for PCT/EP0L/07431 dated May 10, 2001.

Affiliated with

Also associated with

Rating

Detector for variable pressure areas and an electron... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector for variable pressure areas and an electron..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector for variable pressure areas and an electron... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4030851