Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1989-02-21
1990-09-18
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
With detector
250305, 250310, 250311, 313103CM, 313104, 313105CM, 313399, H01J 37244
Patent
active
049580795
ABSTRACT:
Scanning electron microscopy apparatus employing a detector to detect emission of electrons resulting from the impingement of electrons of an electron beam on an object being viewed, the apparatus including an electron beam source providing the electron beam, a magnet providing a magnetic field to direct the electron beam to the object, a first microchannel plate having a first hole through it aligned with the electron beam, a first surface directed toward the electron beam source for receiving low energy electrons that have been emitted from the object and directed through the hole by the magnetic field, a second surface on the opposite side of side first microchannel plate for discharge of multiplied electrons, and a first anode facing the second surface, the first anode being positioned to collect electrons discharged from the second surface.
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Helbig, H. F. et al., "Channel Plate Detection in Low Energy Scanning Electron Microscopy", Scanning Microscopy, vol. 1, No. 4 (1987), pp. 1491-1499.
Kruit, P. and Dubbeldam, L., "An Electron Beam Tester with Dispersive Secondary Electron Energy Analyser", Scanning Microscopy, vol. 1, No. 4, (1987), pp. 1641-1646.
Berman Jack I.
Galileo Electro-Optics Corps.
Nguyen Kiet T.
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