Detector for particle surface contamination

Details Detector for particle surface contamination Detector for particle surface contamination

1997-07-15

1999-02-09

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356335, 250573, G01N 2100, G01N 1502

Patent

active

058701869

ABSTRACT:
A system and method for detecting and quantizing particle fallout contamination particles which are collected on a transparent disk or other surface employs an optical detector, such as a CCD camera, to obtain images of the disk, and a computer for analyzing the images. From the images, the computer detects, counts and sizes particles collected on the disk. The computer also determines, through comparison to previously analyzed images, the particle fallout rate, and generates an alarm or other indication if the rate exceeds a maximum allowable value. The detector and disk are disposed in a housing having an aperture formed therein for defining the area on the surface of the disk which is exposed to the particle fallout. A light source is provided for evenly illuminating the disk. A first drive motor slowly rotates the disk to increase the amount of its surface area which is exposed through the aperture to the particle fallout. A second motor is also provided for incrementally scanning the disk in a radial direction back and forth over the camera so that the camera eventually obtains images of the entire surface of the disk which is exposed to the particle fallout.

REFERENCES:
patent: 4526468 (1985-07-01), Stegmeier et al.
patent: 4825094 (1989-04-01), Borden et al.
patent: 5218211 (1993-06-01), Cresswell et al.
patent: 5245403 (1993-09-01), Kato et al.
patent: 5268735 (1993-12-01), Hayashi
patent: 5412221 (1995-05-01), Curtis et al.
patent: 5438408 (1995-08-01), Weichert et al.
patent: 5455675 (1995-10-01), Witt et al.
patent: 5471298 (1995-11-01), Moriya
patent: 5471299 (1995-11-01), Kaye et al.
patent: 5491642 (1996-02-01), Wormell et al.

Affiliated with

Also associated with

Rating

Detector for particle surface contamination does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector for particle surface contamination, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector for particle surface contamination will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1954396