Detector for mask alignment

Details Detector for mask alignment Detector for mask alignment

1996-07-01

1998-06-23

Nguyen, Matthew V.

Electrical resistors

Mechanically variable

Movable contact electrically adjustable over length of...

437924, H01C 1030, H01L 2170

Patent

active

057709955

ABSTRACT:
A pair of output terminals for measurement of lateral misalignment are formed on an interlayer insulating film, and a series resistance circuit is formed between the pair of output terminals by connecting plural lower layers exposed to plural windows for detection of the lateral misalignment to plural upper layers formed on the interlayer insulating film, so as to measure a synthetic resistance between the pair of output terminals. Similarly, a pair of output terminals for measurement of longitudinal misalignment are formed on the interlayer insulating film, and a series resistance circuit is formed between the pair of output terminals by connecting plural lower layers exposed to plural windows for detection of the longitudinal misalignment to plural upper layers formed on the interlayer insulating film, so as to measure a synthetic resistance between the pair of output terminals. From a change in the synthetic resistance in each series resistance circuit, the misalignment between the interlayer insulating film and the upper layer both in the lateral direction and in the longitudinal direction is measured.

REFERENCES:
patent: 4125418 (1978-11-01), Vinton
patent: 4992394 (1991-02-01), Kostelak, Jr. et al.
patent: 5004925 (1991-04-01), Takahashi et al.
patent: 5335550 (1994-08-01), Satou
patent: 5369050 (1994-11-01), Kawai

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