Electricity: measuring and testing – Magnetic – Magnetometers
Patent
1990-07-25
1993-01-26
Razavi, Michael
Electricity: measuring and testing
Magnetic
Magnetometers
324260, 73DIG10, 73862041, G01R 3302
Patent
active
051825155
ABSTRACT:
A force detector is comprised of resistance elements having a piezo resistance effect such that electric resistance varies due to mechanical deformation, and formed on a single crystal substrate (10), and a strain generative body (20) having a supporting portion (21) and a working portion (23), thus allowing the resistance elements to produce a mechanical deformation on the basis of a displacement with respect to the supporting portion of the working portion. This force detector can detect a force applied to the working portion as changes in resistance values of the resistance elements. The plane on which resistance elements are to be formed on the single crystal substrate is selected so that piezo resistance coefficients in two directions perpendicular to each other exhibit peak. When a weight body (30) is connected to the working portion, it is possible to detect an acceleration acting on the weight body. Moreover, when a magnetic body (330) is connected to the working portion, it is possible to detect a nagnetic force acting on the magnetic body. By using the detector system for acceleration in common to the detector system for magnetic force to perform a compensation computation, detection of a magnetic force which is not influences by acceleration can be made. By devising an arerangement of resistance elements in either detector, it is possible to independently determine magnitudes of objects to be measured with respect to directions of the three-dimensional coordinate system, respectively.
REFERENCES:
patent: 2767974 (1956-10-01), Ballard et al.
patent: 4373399 (1983-02-01), Beloglazov et al.
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4680544 (1987-07-01), Rudolf
patent: 4891985 (1990-01-01), Glenn
Razavi Michael
Shopbell E.
Wacoh Corporation
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