Detector for charged particles

Details Detector for charged particles Detector for charged particles

1988-01-22

1989-05-16

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250305, 250306, 250310, 250368, H01J 37244

Patent

active

048312673

ABSTRACT:
A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.

REFERENCES:
patent: 4246479 (1981-01-01), Gopinathan

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