Detector array module-structure and fabrication

Details Detector array module-structure and fabrication Detector array module-structure and fabrication

1984-01-23

1985-11-05

Gron, Teddy S.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

29572, 29576J, 29590, 29591, 156630, 156632, 156633, 156636, 156645, 156646, 250553, 422186, G06K 928, H05K 306, H01L 2190

Patent

active

045516294

ABSTRACT:
A photo detector array module is disclosed which comprises a stack of semiconductor chips having integrated circuitry on each chip. To permit the emplacement of photo-detectors on the focal plane end, and of thin film circuitry on the back plane end, each plane is etched to cut back the semiconductor material, then covered with passivation material, and thereafter lapped to uncover the ends of electrical leads on the chips.

REFERENCES:
patent: 3206832 (1965-09-01), Strother
patent: 3748479 (1973-07-01), Lehovec
patent: 3970990 (1976-07-01), Carson
patent: 4196508 (1980-04-01), Lorenze
patent: 4290844 (1981-09-01), Rotolante et al.
patent: 4304624 (1981-12-01), Carson et al.

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