Detector array module-structure and fabrication

Details Detector array module-structure and fabrication Detector array module-structure and fabrication

1980-11-14

1982-10-12

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Housings

250578, H01J 502

Patent

active

043541070

ABSTRACT:
A photo-detector array module is disclosed wherein: (a) the focal plane array of photo-detectors is in electrical contact with thin film conductors supported on thin ceramic layers extending perpendicular to the focal plane, and (b) sub-module structures, each composed of such layers, have complementary shapes (such as "O-shaped" and "I-shaped") to provide "component wells" for electronics within the three dimensional space defined at one end by the two-dimensional area of the focal plane. In order to fabricate such a module satisfactorily, a method is disclosed in which each unimaged layer (i.e., layer whereon the thin film conductors have not yet been photodelineated) is individually laminated to the prior structure, and the photo-delineation process on the unimaged layer includes an optical alignment step to insure alignment of the thin film conductors on each layer with those on preceding layers.

REFERENCES:
patent: 3668408 (1972-06-01), Yamashita et al.
patent: 3690953 (1972-09-01), Wise
patent: 3970990 (1976-07-01), Carson

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