Detector array module fabrication process

Details Detector array module fabrication process Detector array module fabrication process

1985-08-02

1987-06-16

Weisstuch, Aaron

Metal working

Method of mechanical manufacture

Assembling or joining

156643, 29576J, 29577R, 29590, H01L 3118

Patent

active

046727370

ABSTRACT:
A photo-detector array module is disclosed which comprises a stack of semiconductor chips having integrated circuitry on each chip. To permit the emplacement of photo-detectors on the focal plane end, and of thin film circuitry on the back plane end, each plane is etched to cut back the semiconductor material, then covered with passivation material, and thereafter lapped to uncover the ends of electrical leads on the chips.

REFERENCES:
patent: 4196508 (1980-04-01), Lorenze, Jr.
patent: 4273596 (1981-06-01), Gutierrez et al.
patent: 4290844 (1981-09-01), Rotolante et al.
patent: 4304624 (1981-12-01), Carson et al.
patent: 4551629 (1985-11-01), Carson et al.

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