Detector array for use in interferometric metrology systems

Details Detector array for use in interferometric metrology systems Detector array for use in interferometric metrology systems

1994-07-06

1996-06-25

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356356, 250237G, G01B 902

Patent

active

055305431

ABSTRACT:
A detector is described, intended for use in metrology systems of the type which produce interference fringe patterns which contain a phase which is characteristic of the parameter under measurement, particularly displacement or position. The detector is in the form of an array of elements whose outputs are electrically interconnected so as to form three or more signals displaced from one another in phase by a fixed amount. The detector is provided on a single monolithic, silicon substrate using microelectronics techniques.

REFERENCES:
patent: 4776698 (1988-10-01), Crosdale
patent: 4828392 (1989-05-01), Nomura et al.
patent: 5098190 (1992-03-01), Wijntjes et al.
patent: 5317385 (1994-05-01), Silva et al.
patent: 5333048 (1994-07-01), Michel et al.
patent: 5357337 (1994-10-01), Michon et al.

Affiliated with

Also associated with

Rating

Detector array for use in interferometric metrology systems does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector array for use in interferometric metrology systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector array for use in interferometric metrology systems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2193649