Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Beam of atomic particles
Patent
1986-10-31
1988-11-01
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Determining nonelectric properties by measuring electric...
Beam of atomic particles
324 715, 357 25, G01N 2740, G01N 2712
Patent
active
047823020
ABSTRACT:
A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicondioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.
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Bastasz Robert J.
Hughes Robert C.
Wampler William R.
Chafin James H.
Eisenzopf Reinhard J.
Hightower Judson R.
McMillan Armand
Solis Jose M.
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