Detection system for cathodoluminescence analysis

Details Detection system for cathodoluminescence analysis Detection system for cathodoluminescence analysis

1989-12-04

1991-04-23

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

2505031, 2505051, H01J 3709

Patent

active

050102532

ABSTRACT:
Detection system for cathodoluminescence analysis apparatus, wherein a screen is placed between the sample to be analyzed and the detector to intercept the electrons backscattered by the sample towards the detector. The screen is a plate of a glass which is transparent in a wide spectral interval, has a rather high conductivity, and does not present cathodoluminescence effects.

REFERENCES:
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patent: 3864570 (1975-02-01), Zingaro
patent: 4121010 (1978-10-01), Lasky et al.
patent: 4218617 (1980-08-01), Cazaux
patent: 4806772 (1989-02-01), Lindmayer
J. M. Reau et al., "Alkali Fluoride Containing Fluorozirconate Glasses . . ", (Journal of Solid State Chemistry, 60, 159-164, 1985).
B. Carette et al., "Ionic Conduction of Sulphide-Based Glasses . . . ", (Glass Technology, vol. 24, No. 3-Jun. 1983).
J. Marek et al., "A Novel Scheme for Detection of Defects in . . . Semiconductors . . . ", (Journal of Electrochemical Society, Jun. 1985).
Matusita et al., "Anionic Conduction . . . ", (Technological University . . . , Nagaoka, Japan).

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