Detection of surface particles by dual semiconductor lasers havi

Details Detection of surface particles by dual semiconductor lasers havi Detection of surface particles by dual semiconductor lasers havi

1987-07-17

1989-03-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250571, 356401, G01J 132

Patent

active

048145963

ABSTRACT:
Disclosed is an apparatus for detecting particles comprising semiconductor laser drive means for performing feedback control of semiconductor lasers, each thereof incorporating a sensor therewith for monitoring laser-output thereof, by using the output of the sensor, means for holding the feedback voltage, illuminating means including a plurality of optical means disposed to oppose each other so that the laser-outputs from the semiconductor lasers are obliquely applied onto a specimen, and detection means for detecting the light scattered from the particles present on the specimen.

REFERENCES:
patent: 4363962 (1982-12-01), Shida
patent: 4375067 (1983-02-01), Kitamura
patent: 4418467 (1983-12-01), Iwai
patent: 4523089 (1985-06-01), Maeda et al.
patent: 4701609 (1987-10-01), Koishi et al.

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