Detection of subsurface defects by reflection interference

Details Detection of subsurface defects by reflection interference Detection of subsurface defects by reflection interference

1979-01-29

1981-11-24

Smith, Alfred E.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356431, 250341, 250359, G01B 1100, G01N 2184, G01J 100

Patent

active

043021085

ABSTRACT:
A process for detecting defects in a multiply layered light transmitting structure, comprising illuminating the surface of the structure with a beam of light at an angle of incidence to the structure at which at least a portion of the beam will be reflected, and detecting the intensity of the reflected beam to locate subsurface as well as surface anomalies in the structure.

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patent: 3734624 (1973-05-01), Cornelius
patent: 3748047 (1973-07-01), Millgard et al.
patent: 3858981 (1975-01-01), Jaerisch et al.
patent: 3994586 (1976-11-01), Sharkins et al.

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