Detection of spatially repeating signatures

Details Detection of spatially repeating signatures Detection of spatially repeating signatures

2006-02-28

2006-02-28

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S016000

Reexamination Certificate

active

07006886

ABSTRACT:
A method for analyzing defects on a substrate, including inspecting the substrate to detect the defects, identifying the defects by location, analyzing the defects to detect extended objects, and analyzing the extended objects for repetition across the substrate. Thus, the present invention extends beyond the present analysis methods, by analyzing the extended objects for repetition across the substrate. In this manner, correlation with processing problems can be more readily detected, in cases where the individual defects themselves, of which the extended objects are formed, do not appear to have repeating properties.

REFERENCES:
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 6088712 (2000-07-01), Huang et al.
patent: 6167150 (2000-12-01), Michael et al.
patent: 6630996 (2003-10-01), Rao et al.
patent: 6701259 (2004-03-01), Dor et al.
patent: 2002/0035435 (2002-03-01), Ninomiya et al.
patent: 2002/0161532 (2002-10-01), Dor et al.
patent: 2003/0135295 (2003-07-01), Dor et al.
patent: 2004/0122859 (2004-06-01), Gavra et al.
patent: 2004/0158409 (2004-08-01), Teshima et al.

Affiliated with

Also associated with

Rating

Detection of spatially repeating signatures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detection of spatially repeating signatures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detection of spatially repeating signatures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3633414