Detection of small bound mass

Details Detection of small bound mass Detection of small bound mass

2005-03-29

2008-08-12

Williams, Hezron E. (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C073S024010, C073S03200R, C073S061750, C073S064530, C436S518000, C422S082010

Reexamination Certificate

active

07409851

ABSTRACT:
Prefabricated catalyzing adsorption sites are incorporated into small oscillators. In one embodiment, the sites are formed of precisely positioned gold anchors on surface micromachined oscillators. The micromachined oscillators may be formed of silicon, such as polysilicon, or silicon nitride in various embodiments. The sites allow special control of chemical surface functionality for the detection of analytes of interest. Thiolate molecules may be adsorbed from solution onto the gold anchors, creating a dense thiol monolayer with a tail end group pointing outwards from the surface of the gold anchor. This results in a thiolate self-assembled monolayer (SAM), creating a strong interaction between the functional group and the gold anchor.

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