Detection of semiconductor failures by photoemission and electro

Details Detection of semiconductor failures by photoemission and electro Detection of semiconductor failures by photoemission and electro

1991-06-25

1992-12-29

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250311, 371 27, G01R 3128

Patent

active

051754959

ABSTRACT:
A technique for pinpointing and analyzing failures in complex integrated circuits is disclosed. A device-under-test (DUT) is powered up. Using Liquid Crystal (LC) or Photo-Emission (PE) techniques, leakage sites are identified. The leakage sites are associated with suspect circuit elements on the DUT, and candidate I/Os associated with the suspect failing elements are selected for subsequent testing. Using the candidate I/Os, a truncated set of test vectors is created, and applied to the DUT. While the DUT is running the truncated set of test vectors, the suspect elements are rigorously probed to identify failing elements. SEM images are preferably viewed simultaneously. In this manner, a log of failing elements is derived, for circuit or process re-design.

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Ultraprobe Brochure, Ultraprobe, Laguna Hills, Calif.

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