Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2005-02-24
2009-06-30
Noori, Max (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
C073S104000, C073S105000
Reexamination Certificate
active
07552645
ABSTRACT:
A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.
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Arlett Jessica
Bargatin Igor
Gudlewski Benjamin
Li Mo
Myers Edward B.
California Institute of Technology
Foley & Lardner LLP
Noori Max
LandOfFree
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