Detection circuit and foreign matter inspection apparatus...

Details Detection circuit and foreign matter inspection apparatus... Detection circuit and foreign matter inspection apparatus...

2011-08-02

2011-08-02

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

07990529

ABSTRACT:
In a foreign matter inspection apparatus for a semiconductor wafer, a PMT which detects reflection light, an amplifier which amplifies a signal detected by the PMT and in which response characteristics of amplification are controlled by a control signal, an A/D converter which converts the signal amplified by the amplifier into a predetermined code and outputs the code, a control circuit which generates a control signal based on information of the semiconductor wafer having a correlation with the reflection light, and a data processing circuit which detects a foreign matter on the semiconductor wafer based on the code output from the A/D converter are provided.

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