Detection apparatus, detection method and electron beam...

Details Detection apparatus, detection method and electron beam... Detection apparatus, detection method and electron beam...

2006-08-22

2006-08-22

Hindi, Nabil (Department: 2655)

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

C369S126000, C250S441110

Reexamination Certificate

active

07095699

ABSTRACT:
A detection apparatus, a detection method and an electron beam irradiation apparatus for detecting deflection electrons in order to precisely focus even if a vacuum seal valve is provided. An electron beam irradiation apparatus including a vacuum seal valve mechanism which is provided in a static pressure floating pad, and opens/closes an electron beam passage with a piston so as to switch between an electron beam irradiation state and a vacuum seal state, and a deflection electron detector which is provided between the vacuum seal valve mechanism and a master disk and detects a deflection electron signal generated from the master disk with electron beam irradiation.

REFERENCES:
patent: 6775223 (2004-08-01), Eldredge et al.
patent: 03-064089 (1992-10-01), None
patent: 10-215836 (2000-02-01), None
patent: 10-219232 (2000-02-01), None

Affiliated with

Also associated with

Rating

Detection apparatus, detection method and electron beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detection apparatus, detection method and electron beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detection apparatus, detection method and electron beam... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3689608