Detecting system for surface form of object

Details Detecting system for surface form of object Detecting system for surface form of object

1998-05-27

2000-05-09

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

3562371, 3562372, 3562373, 3562374, G01N 2100

Patent

active

06061126&

ABSTRACT:
A detecting system for a surface form of an object is disclosed. The system comprises a light source section emitting a plurality of slit-like probe rays incidenting on a predetermined inspected area of an inspected object at predetermined pitches, an image pick-up section imaging reflected lights of the probe rays from the inspected area, the image pick-up section imaging the reflected lights from a direction different from a transmission axis of the light source section, the image pick-up section disposed so as to image the reflected light from the inspected area in a batch, and a computation section converting image data from the image pick-up section into data of surface height of the inspected object using a trigonometrical survey method.

REFERENCES:
patent: 5506676 (1996-04-01), Hendler et al.
patent: 5715050 (1998-02-01), Haga

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