Detecting pinholes in vertical cavity surface-emitting laser...

Details Detecting pinholes in vertical cavity surface-emitting laser... Detecting pinholes in vertical cavity surface-emitting laser...

2006-03-14

2006-03-14

Picardat, Kevin M. (Department: 2822)

Semiconductor device manufacturing: process

With measuring or testing

C438S007000, C438S008000, C438S016000

Reexamination Certificate

active

07011979

ABSTRACT:
A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.

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S. Xie et al., “Reliability of Oxide VCSELs in non-Hermetic Environments”, Proceedings of the 15th IEEE Laser and Electro-Optics Society Annual Meetings (LEOS 2002), Glasgow, Scotland, p. 544, paper WW2, Nov. 10-14, 2002, 2 pages.
S. Xie et al., “Reliability and Failure Mechanisms of Oxide VCSELs in non-Hermetic Environments”, Prooceedings of SPIE vol. 4994, Vertical-Cavity Surface-Emitting Lasers VII, paper 4994-21, San Jose, CA, Jan. 25-31, 2003, 8 pages.
S. Xie et al., “Failure Mode Analysis of Oxide VCSELs in High Humidity and High Temperature”, IEEE/OSA Journal of Lightwave Technology, Mar. 2003 (in press) pp. 1-11.

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