Detecting NO.sub.x using thin film zinc oxide semiconductor

Details Detecting NO.sub.x using thin film zinc oxide semiconductor Detecting NO.sub.x using thin film zinc oxide semiconductor

1981-01-23

1982-11-16

Kreitman, Stephen A.

Measuring and testing

Gas analysis

Gas chromatography

G01N 2704

Patent

active

043589502

ABSTRACT:
A method for detecting NO.sub.x species in an oxygen-containing gas comprises measuring the electrical resistance of a thin film of oxygen-deficient zinc oxide exposed to the sample.

REFERENCES:
patent: 4169369 (1979-10-01), Chang
N. Ichinose et al., "Ceramic Oxide Semiconductor Elements for Detecting Gaseous Components", Ceramics, 11 (3), pp. 203-211, 1976.
T. Seiyama et al., "Study on a Detector for Gaseous Components Using Semiconductive Thin Films", Analytical Chemistry, vol. 38, No. 8, pp. 1069-1073, Jul. 1966.

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