Detecting minority gaseous species by light-emission...

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

Reexamination Certificate

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Reexamination Certificate

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07403283

ABSTRACT:
A method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of the radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of the sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

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patent: WO 02/44698 (2002-06-01), None
U.S. Appl. No. 11/064,483, entitled “Detecting Gaseous Species by Light-Emission Spectrometry with Spectrum Processing.”.

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