Detecting irregularities in a coating on a substrate

Details Detecting irregularities in a coating on a substrate Detecting irregularities in a coating on a substrate

1982-01-11

1984-09-04

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

356237, 250225, G01N 2121

Patent

active

044694423

ABSTRACT:
Irregularities in a coating on a substrate in which the coating includes optical scattering centers can be detected by irradiating the coating with polarized light and examining light from the coating through a filter which removes light having the same polarization as the initial beam. Light scattered by the optical scattering centers is transmitted through the filter, while specularly reflected light from the top surface of the coating, from the substrate exposed by gaps in the coating, or reflected by alien material on the coating is filtered out. As a result irregularities can be detected as intensity minima of the transmitted radiation.

REFERENCES:
patent: 2947212 (1960-08-01), Woods
patent: 3904293 (1975-09-01), Gee
patent: 4015127 (1977-03-01), Sharkins
patent: 4342515 (1982-08-01), Akiba
patent: 4381151 (1983-04-01), Smith

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