Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-06-02
1999-05-25
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 734
Patent
active
059070960
ABSTRACT:
A scanning probe microscope is used as an atomic force microscope during a first pass of a vibrating probe tip along a line extending along a sample surface, with data representing topographical features occurring along the line being stored. In a second pass along the line, the topographical data is used to allow movement of the vibrating probe tip with the center of vibration at a fixed distance above the sample surface, as the resulting amplitude or phase angle of probe vibration provides an indication of the level of a magnetic or electric field. In the second pass, the amplitude of probe tip vibrations is substantially less that the amplitude of such vibrations in the first pass, so that the probe operates out of contact with the sample surface, even if the center of such vibrations occurs at the same level during both passes, or if this center is brought closer to the sample surface during the second pass.
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Davidge Ronald V.
International Business Machines - Corporation
Noland Thomas P.
Tomlin Richard A.
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