Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-01-27
1995-09-05
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250237G, G01B 902
Patent
active
054483565
ABSTRACT:
A device for detecting the displacement of an object is provided with a semiconductor laser having an active layer for emitting laser beams in two directions, mirrors for directing the laser beams toward a diffraction grating provided on the object, and a detector for receiving the interfering lights diffracted by the diffraction grating. The active layer of the semiconductor laser is arranged substantially parallel to the diffraction grating, to save space, also to enable light deflection such that the spreading direction of the light beams from the semiconductor laser coincides with the direction of pitch of the diffraction grating. The diffraction grating is irradiated with an improved efficiency, giving diffracted lights with higher intensity to the detector and improving the S/N ratio of detection. The space between the semiconductor laser and the object is reduced, thus reducing the entire volume of system.
REFERENCES:
patent: 4842408 (1989-06-01), Yoshii et al.
patent: 5068530 (1991-11-01), Ieki et al.
patent: 5194745 (1993-03-01), Takamiya
patent: 5272512 (1993-12-01), Kadowaki et al.
Nose Hiroyasu
Takeuchi Seiji
Yoshii Minoru
Canon Kabushiki Kaisha
Turner Samuel A.
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