Detecting arc discharges

Details Detecting arc discharges Detecting arc discharges

2007-11-28

2011-12-27

Valone, Thomas (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

Reexamination Certificate

active

08085054

ABSTRACT:
To detect arc discharges occurring in a plasma, a parameter of the plasma process is determined, and after a first period of time following the detection of an arc discharge the parameter is again determined. In the event that after the first period of time no arc discharge is detected, a first arc suppression countermeasure for suppression of arc discharges is executed.

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