Detecting a defect of an integrated circuit

Details Detecting a defect of an integrated circuit Detecting a defect of an integrated circuit

2005-07-26

2005-07-26

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S446000

Reexamination Certificate

active

06922235

ABSTRACT:
Detecting a defect of an integrated circuit includes illuminating an integrated circuit with an optical beam. The integrated circuit includes a substrate, a dielectric layer disposed outwardly from the substrate, and a sequence of metal links disposed within the dielectric layer. An end metal link of the sequence of metal links is grounded. A change of relative brightness of the dielectric layer proximate to the sequence of metal links is detected. The change of relative brightness comprises a difference between a first brightness associated with a first metal link and a second brightness associated with a second metal link coupled to the first metal link. The change of relative brightness is associated with a defect of the integrated circuit.

REFERENCES:
patent: 5903343 (1999-05-01), Ning et al.

Affiliated with

Also associated with

Rating

Detecting a defect of an integrated circuit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detecting a defect of an integrated circuit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detecting a defect of an integrated circuit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3430189