Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including contaminant removal or mitigation
Patent
1995-11-17
1999-09-07
Graybill, David E.
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Including contaminant removal or mitigation
438120, 438906, H01L 2148
Patent
active
059500719
ABSTRACT:
A process for detachment and removal of microscopic contaminant particles from a surface includes a pulsed detach light directed at the surface to excite a contaminant particle thereon at or near its resonant frequency, to thereby detach the particle from the surface; and a photophoresis light directed at the particle to move it by photophoresis, to thereby prevent its reattachment to the surface. A thermal gradient may also be applied to control the velocity and direction of particle movement by thermophoresis. Detach light is of variable pulse frequency and angle of incidence.
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Hammond Peter M.
Kearney Kevin J.
Bird Robert J.
Graybill David E.
Lightforce Technology, Inc.
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