Detachable detection window and detecting system

Details Detachable detection window and detecting system Detachable detection window and detecting system

2007-03-29

2009-11-10

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

Reexamination Certificate

active

07616297

ABSTRACT:
A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base and the cannular tube are assembled to form the detachable detection window.

REFERENCES:
patent: 5748297 (1998-05-01), Suk et al.
patent: 2003/0019840 (2003-01-01), Smith et al.
patent: 2073524 (1991-03-01), None
patent: 09-330917 (1997-12-01), None
patent: 10-209116 (1998-08-01), None

Affiliated with

Also associated with

Rating

Detachable detection window and detecting system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detachable detection window and detecting system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detachable detection window and detecting system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4108028