Coating processes – Measuring – testing – or indicating
Patent
1995-01-19
1996-08-06
Beck, Shrive
Coating processes
Measuring, testing, or indicating
427446, 427452, 427456, 427566, 4272551, 4272552, B05D 112
Patent
active
055431704
ABSTRACT:
System and method for controlling alloy composition during molecular beam epitaxy growth of group III-V ternaries at high substrate temperature or under any conditions which give rise to significant desorption rates is described which incorporates desorption mass spectrometry in a real time feedback loop for continuous monitoring and control of layer composition by control of incident group V (e.g., arsenic) flux.
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Beck Shrive
Kundert Thomas L.
Scearce Bobby D.
Talbot Brian K.
The United States of America as represented by the Secretary of
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