Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-05-17
2011-10-18
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S291000, C359S292000, C359S295000, C359S298000, C359S318000, C359S512000, C359S513000
Reexamination Certificate
active
08040587
ABSTRACT:
A package structure and method for packaging a MEMS device is described. In one embodiment, the MEMS base device can include a substrate having a MEMS device formed thereon, a backplate, an exposed or activated desiccant disposed between the backplate and the transparent substrate, and a cover at least partially encapsulating said desiccant. In another embodiment, a MEMS display device can be manufactured by contacting the substrate and/or backplate with a cover which at least partially encapsulates a desiccant, joining the backplate and the substrate to form a package, and exposing or activating the desiccant.
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Knobbe Martens Olson & Bear LLP
Lester Evelyn A.
QUALCOMM MEMS Technologies Inc.
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