Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1991-02-27
1991-12-24
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430168, 430189, 430191, 430193, 534559, 534556, 534557, C03C 152, C03C 156
Patent
active
050751930
ABSTRACT:
The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitizing agent.
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Dresely Stefan
Raulin Ditmar
Bowers Jr. Charles L.
Ciba-Geigy Corporation
Hall Luther A. R.
Young Christopher G.
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