Desensitized quinone diazide compounds utilizing microcrystallin

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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Details

430168, 430189, 430191, 430193, 534559, 534556, 534557, C03C 152, C03C 156

Patent

active

050751930

ABSTRACT:
The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitizing agent.

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