Optics: measuring and testing – Dimension – Cavities
Reexamination Certificate
2006-03-28
2006-03-28
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Dimension
Cavities
C356S625000, C356S624000
Reexamination Certificate
active
07019849
ABSTRACT:
A depth measuring apparatus is disclosed that comprises a mover for moving in an optical axis direction an objective lens for condensing a parallel light beam from a light emitter onto a measurement spot of a sample and converting light from the measurement spot to a parallel light beam, image forming lens for projecting light from the measurement spot obtained via the objective lens, aperture for passing only light from the focal point position of the objective lens, a surface scattered light information acquirer for detecting, while the objective lens is being moved, the amount of light passing through the aperture and having an excitation wavelength of the test subject, a fluorescence information acquirer for detecting, while the objective lens is being moved, the amount of light passing through the aperture and having a fluorescence wavelength of the subject, and a distance information acquirer for obtaining distance information between a position of the objective lens where the detection value of surface scattered light by means of the surface scattered light information acquirer is maximum and a position of the objective lens where the detection value of fluorescence by means of the fluorescence information acquirer is maximum, wherein the depth of the test subject within the sample is obtained based on the acquired distance information with a position on a surface of the sample as a reference.
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Masago Hisashi
Yamanishi Takashi
Jasco Corporation
Oliff & Berridg,e PLC
Punnoose Roy M.
Toatley , Jr. Gregory J.
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