Deposition tool cleaning process having a moving plasma zone

Details Deposition tool cleaning process having a moving plasma zone Deposition tool cleaning process having a moving plasma zone

2006-07-25

2010-10-19

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

C156S345260

Reexamination Certificate

active

07815738

ABSTRACT:
The present invention provides, in one embodiment, a process for cleaning a deposition chamber (100). The process includes a step (100) of forming a reactive plasma cleaning zone by dissociating a gaseous fluorocompound introduced into a deposition chamber having an interior surface and in a presence of a plasma. The process (100) further includes a step (120) of ramping a flow rate of said gaseous fluorocompound to move the reactive plasma cleaning zone throughout the deposition chamber, thereby preventing a build-up of localized metal compound deposits on the interior surface. Other embodiments advantageously incorporate the process (100) into a system (200) for cleaning a deposition chamber (205) and a method of manufacturing semiconductor devices (300).

REFERENCES:
patent: 5336324 (1994-08-01), Stall et al.
patent: 5565038 (1996-10-01), Ashley
patent: 6125859 (2000-10-01), Kao et al.
patent: 6374831 (2002-04-01), Chandran et al.
patent: 7112546 (2006-09-01), Blanco et al.
patent: 7322368 (2008-01-01), Sekiya et al.
patent: 2002/0073922 (2002-06-01), Frankel et al.
patent: 2002/0183977 (2002-12-01), Sui et al.
patent: 2003/0005943 (2003-01-01), Singh et al.
patent: 2003/0051665 (2003-03-01), Zhao et al.
patent: 2003/0119328 (2003-06-01), Fujisato
patent: 2003/0183243 (2003-10-01), Collins et al.
patent: 2006/0130873 (2006-06-01), Richardson et al.
patent: 2007/0048882 (2007-03-01), Kutney et al.
patent: 2008/0075888 (2008-03-01), Rajagopalan et al.

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