Deposition of thin films using supercritical fluids

Details Deposition of thin films using supercritical fluids Deposition of thin films using supercritical fluids

1985-11-01

1988-04-12

Lusignan, Michael R.

Coating processes

With post-treatment of coating or coating material

Solid treating member or material contacts coating

210658, 427370, B01D 1508, B05D 312, C02F 128

Patent

active

047373849

ABSTRACT:
A process of depositing thin film onto a substrate using super-critical fluids.

REFERENCES:
patent: 4582731 (1986-04-01), Smith
"Supercritical Fluids Offer Improved Separations" Chem. Eng. News, vol. 59(31) pp. 16-17 (1981).
"Extraction with Supercritical Gases" Chem. Eng. Science, vol. 36, 11 pp. 1769-1788 (1981) D. F. Willians et al.

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