Deposition of thin films using an infrared laser

Details Deposition of thin films using an infrared laser Deposition of thin films using an infrared laser

2006-02-14

2006-02-14

Padgett, Marianne (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

C427S561000, C219S121850

Reexamination Certificate

active

06998156

ABSTRACT:
This invention pertains to transfer of a solid target material onto a substrate by vaporizing the material by irradiating it with intense light of a resonant vibrational mode of the material and depositing the vaporized material on a substrate in a solid form.

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