Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2005-09-02
2010-11-23
Austin, Aaron (Department: 1794)
Stock material or miscellaneous articles
Composite
Of inorganic material
C204S192120, C204S192150, C204S192220
Reexamination Certificate
active
07838133
ABSTRACT:
In accordance with the present invention, deposition of perovskite material, for example barium strontium titanite (BST) film, by a pulsed-dc physical vapor deposition process or by an RF sputtering process is presented. Such a deposition can provide a high deposition rate deposition of a layer of perovskite. Some embodiments of the deposition address the need for high rate deposition of perovskite films, which can be utilized as a dielectric layer in capacitors, other energy storing devices and micro-electronic applications. Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the BST layer.
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Demaray Richard E.
Zhang Hongmei
Austin Aaron
Haynes and Boone LLP
SpringWorks LLC
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