Deposition of ordered crystalline films

Details Deposition of ordered crystalline films Deposition of ordered crystalline films

1980-06-27

1981-10-27

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204298, C23C 1500

Patent

active

042971896

ABSTRACT:
Deposition of ordered polycrystalline films of zinc oxide and other materials having a strongly preferred crystal growth direction and a high degree of symmetry about the preferred direction is achieved consistently by disposing a charged electrode in a sputtering chamber to limit bombardment of the film and underlying substrate by charged particles.

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patent: 4158589 (1979-06-01), Keller et al.
N. Chubachi, "ZnO Films for Surface Acoustooptic Devices On Non-Piezoelectric Substrates", Proceedings IEEE, vol. 63, pp. 772-774, (1976).

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