Deposition of materials

Details Deposition of materials Deposition of materials

1984-11-05

1986-03-18

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118719, 118723, 118728, 118729, 427 86, 4272555, B05D 306

Patent

active

045768307

ABSTRACT:
In a method and apparatus for continuous plasma CVD deposition in and through a vacuum system, box carriers are provided to carry both the substrates and the plasma exciting electrodes through the system. Contamination of the system and cross doping of the applied coatings are reduced.

REFERENCES:
patent: 2930347 (1960-03-01), Bulloff
patent: 3787312 (1974-01-01), Wagner et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4089735 (1978-05-01), Sussmann
patent: 4274936 (1981-06-01), Love

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