Deposition heaters

Details Deposition heaters Deposition heaters

1989-09-13

1991-07-09

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

H05B 326

Patent

active

050312294

ABSTRACT:
A gaseous deposition source for providing a deposition material that emanates from a crucible having mulitple thin film heating elements formed thereon, with each adjacent pair being separated by an insulating layer therebetween. A gaseous deposition source can have a crucible with a cover thereon with one or more apertures therein and with thin film heating elements on that cover about such apertures. A substrate heater may be used formed of thin film heating elements provided on a base.

REFERENCES:
patent: 1402585 (1922-01-01), Epstein
patent: 1892492 (1933-01-01), Shapleigh
patent: 3525452 (1970-08-01), Hofmann
patent: 3806701 (1974-04-01), Scott
patent: 4061800 (1977-12-01), Anderson
patent: 4146774 (1979-03-01), Fraas
patent: 4286545 (1981-09-01), Takagi et al.
patent: 4330932 (1982-05-01), Morris et al.
patent: 4396899 (1983-08-01), Ohno
patent: 4426569 (1984-01-01), Miller et al.
patent: 4447276 (1984-05-01), Davies et al.
patent: 4495155 (1985-01-01), Ricard et al.
patent: 4518846 (1985-05-01), Freeouf et al.
patent: 4534312 (1985-08-01), Shinya et al.
patent: 4543467 (1985-09-01), Eisele
patent: 4545339 (1985-10-01), Brooks et al.
patent: 4553022 (1985-11-01), Colombo
patent: 4560907 (1985-12-01), Tamura et al.
patent: 4587843 (1986-05-01), Tokura et al.
patent: 4662981 (1987-05-01), Fujiyasu et al.
patent: 4700660 (1987-10-01), Levchenko et al.
patent: 4726822 (1988-02-01), Cates et al.
patent: 4734563 (1988-03-01), Lloyd
patent: 4739657 (1988-04-01), Higashi et al.
patent: 4748315 (1988-05-01), Takahashi et al.
patent: 4748367 (1988-05-01), Bloch et al.
patent: 4782708 (1988-11-01), Harrington et al.
patent: 4812326 (1989-03-01), Tsukazaki et al.
Advertising Brochure: "Boralloy Pyrolytic Boron Nitride (PBN)/Pyrolytic Graphite (PG) Resistance Heating Elements," Union Carbide Coatings Service Corporation.

Affiliated with

Also associated with

Rating

Deposition heaters does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Deposition heaters, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Deposition heaters will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-624202