Deposition heaters

Details Deposition heaters Deposition heaters

1991-04-05

1992-10-20

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219464, 219466, 219453, H05B 374

Patent

active

051572400

ABSTRACT:
A gaseous deposition source for providing a deposition material that emanates from a crucible having multiple thin film heating elements formed thereon, with each adjacent pair being separated by an insulating layer therebetween. A gaseous deposition source can have a crucible with a cover thereon with one or more apertures therein and with thin film heating elements on that cover about such apertures. A substrate heater may be used formed of thin film heating elements provided on a base.

REFERENCES:
patent: 3118042 (1964-01-01), Parker
patent: 3119918 (1964-01-01), Simon
patent: 3177345 (1965-04-01), Plumat
patent: 3539768 (1970-11-01), Eisler

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