Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1997-03-10
2000-09-05
Knode, Marian C.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
118723R, 118724, C23F 102
Patent
active
061137324
ABSTRACT:
A deposit film forming apparatus is characterized in that a temperature control member for controlling the temperature of a wall of deposition chamber is in contact with an outer wall of a deposition chamber through a heat conductivity adjusting plate, which can prevent overcooling while suppressing an increase in the temperature of the wall of deposition chamber during film formation and which can maintain the temperature of the wall of deposition chamber at a preferable temperature for deposition of film for a long time, thereby forming a deposit film. As a result, the apparatus can mass-produce deposit films of stable quality, especially, large-area and good-quality photovoltaic elements utilizing amorphous semiconductors, over a long period.
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Echizen Hiroshi
Kanai Masahiro
Ohtoshi Hirokazu
Tanaka Masatoshi
Yoshida Kohei
Alejandro Luz
Canon Kabushiki Kaisha
Knode Marian C.
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